高纯金属溅射靶材 | ||||
品名 | 熔点(℃) | 密度(g/cm3) | 纯度 | |
铝(Al) | 660.37 | 2.702 | 4N/5N | |
银(Ag) | 961.93 | 10.5 | 4N | |
金(Au) | 1064 | 19.32 | 4N | |
铋(Bi) | 271.3 | 9.8 | 4N/5N | |
石墨(C) | 3675 | 1.8 | 3N5/4N | |
铈(Ce) | 798 | 6.78 | 3N | |
镉(Cd) | 320.9 | 8.65 | 4N | |
钴(Co) | 1495 | 8.9 | 3N5 | |
铬(Cr) | 1857 | 7.19 | 2N5/3N/3N5 | |
铜(Cu) | 1083 | 8.96 | 4N/5N | |
镝(Dy) | 271.3 | 9.8 | 3N | |
铒(Er) | 1529 | 9.05 | 3N | |
铁(Fe) | 1535 | 7.89 | 2N7/4N | |
锗(Ge) | 937.4 | 5.323 | 6N | |
钆(Gd) | 1313 | 7.895 | 3N | |
铪(Hf) | 2150 | 13.2 | 3N | |
铟(In) | 156.61 | 7.31 | 4N | |
铱(Ir) | 2410 | 22.42 | 3N | |
镧(La) | 918 | 6.7 | 3N | |
镁(Mg) | 648.8 | 1.738 | 3N5 | |
锰(Mn) | 1244 | 7.43 | 2N5 | |
钼(Mo) | 2917 | 10.2 | 3N5 | |
镍(Ni) | 1453 | 8.9 | 3N/4N5 | |
铌(Nb) | 2488 | 8.57 | 3N5 | |
钕(Nd) | 3074 | 7 | 3N | |
铅(Pb) | 327.502 | 11.34 | 4N | |
钯(Pd) | 1552 | 12.02 | 3N5 | |
铂(Pt) | 1772 | 21.45 | 3N5 | |
钌(Ru) | 2250 | 12.2 | 3N5 | |
锑(Sb) | 630.74 | 6.684 | 4N | |
硒(Se) | 217 | 4.81 | 4N/5N | |
硅(Si) | 1410 | 2.33 | 5N | |
钐(Sm) | 1074 | 7.54 | 3N | |
锡(Sn) | 231.97 | 7.3 | 3N5/4N/5N | |
钽(Ta) | 2996 | 16.6 | 3N5 | |
铽(Tb) | 1356 | 8.27 | 3N5 | |
碲(Te) | 449.5 | 6.24 | 4N | |
钛(Ti) | 1668 | 4.5 | 2N7/4N5 | |
钒(V) | 1890 | 6.1 | 3N | |
钨(W) | 3410 | 19.3 | 3N5 | |
钇(Y) | 1523 | 4.47 | 3N | |
锌(Zn) | 419.58 | 7.14 | 4N/5N | |
锆(Zr) | 1852 | 6.4 | 2N5/3N |